Wafer transport robots in 300mm wafer fabs.make 9 kHz fields that limit the performance of electron beam tools and are abarrier to achieving the next semiconductor CD node. The SC26 is a widebandwidth system that can cancel magnetic fields from DC to above 9 kHz. Toachieve its wide bandwidth, the SC26 uses low inductance field cancellingcables, installed in the electron beam tool enclosure.


The SC26 has inputs for two 200 kHz ACfield sensors (blue) that it can mix to optimise the electron beam toolperformance. These provide useful cancelling down to 10 Hz.Cancelling can beextended down to DC by adding a “Sensor SC24/DC+AC” and a sensor combiner foreach input channel used.


The SC26 cannot be used with larger cablesin a “room” installation like our SC24 system which operates at lowerfrequencies.


SC26 Features



SC26 Product Guide (pdf)

Brochure for the full SC26 system

  • Integrated UV/Vis Spectroelectrochemical System
  • Honeycomb Spectroelectroelectrochemical Cell
  • Quartz Photoelectrochemical Cell